The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a plasma made from hydrogen fluoride.

Researchers from Lam Research, the University of Colorado Boulder, and Princeton Plasma Physics Laboratory (PPPL) investigated ways to speed up the cryogenic reactive ion etching process for 3D NAND ...

Vistra Energy, PG&E and other defendants face allegations of negligence following Moss Landing battery facility fire in new ...

The world's largest lithium ion storage facility has a sketchy track record after just a few years in operation.

To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

Heavy metals detected in the soil have also created health implications for Monterey County’s agriculture industry, and the ...

After a massive lithium ion battery storage site exploded into flames in Monterey County — spewing toxic gases into the air ...

The researchers compared results from this process to a more advanced cryo-etching process that uses hydrogen fluoride gas to create the plasma. “Cryo etch with the hydrogen fluoride plasma ...

To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

The researchers compared results from this process to a more advanced cryo-etching process that uses hydrogen fluoride gas to create the plasma. “Cryo etch with the hydrogen fluoride plasma showed a ...

This is a major concern because lithium battery fires can be toxic. "For lithium fires we worry about hydrogen fluoride, which is a chemical that's released from these fires. In small amounts ...

After a fire at a Monterey County battery storage facility, scientists say high levels of heavy metals were found at a nearby ...