Lam Research Corp. has rolled out what it claims is an advanced plasma conductor etch tool needed for 3D chipmaking. Called ...
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Lam Research unveils Dextro, a maintenance robot for fabsCurrently, Dextro is compatible with Lam's Flex G and H series dielectric etch tools. Plans are in place to extend its compatibility to more tools by 2025, enabling broader use across the ...
Breakthrough EUV Dry Photoresist Technology from Lam Research Adopted by Leading Memory Manufacturer
Lam's dry photoresist technologies optimize the patterning process from resist application and stack deposition through final etching and cleaning, offering several advantages over conventional ...
Lam Research ... and dry-resist processing technologies will add further opportunity in the coming year. As we look forward, we view the increasing importance of deposition and etch technology ...
Lam Research Establishes 28nm Pitch in High-Resolution Patterning Through Dry Photoresist Technology
FREMONT, Calif., Jan. 14, 2025 /PRNewswire/ -- Lam Research Corporation (Nasdaq: LRCX) today announced that its innovative dry photoresist (dry resist) technology has been qualified for direct ...
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